X-ray diffraction grating
Phase gratings and absorption gratings for X-ray Talbot imaging with low sidewall roughness and excellent X-ray radiation resistance.
feature
NTT-AT 's phase gratings and absorption gratings for X-ray Talbot imaging are manufactured based on high aspect ratio Si etching technology and Au plating technology, and achieve sufficiently high X-ray radiation resistance compared to conventional photoresist gratings. In addition, they reduce the deterioration of the measurement environment due to debris generation.- Phase grating: Si structure with low roughness and high perpendicularity
- Absorption grating: Au-plated absorber embedded in a Si structure with low roughness and high verticality
Standard product specifications
| Absorption grating | Phase Grating | |
|---|---|---|
| material | Absorption part: Au, transmission part: Si | Phase modulation section: Si |
| membrane | Silicon, thickness 50 μm | Silicon, thickness 50 μm |
| Pitch/Height | 3 μm / 10 μm | 2 μm / 20 μm |
| Maximum Area | 10mm square | 40mm square |
Contact us
Please feel free to contact us for inquiries such as an estimate.