X-ray Fresnel zone plate
We offer highly irradiation resistant X-ray Fresnel zone plates made of SiC membrane and Ta absorber.
feature
In the X-ray region, where the refractive index of the material is approximately equal to 1, unlike visible light, it is not possible to focus the light with a convex lens, so a Fresnel zone plate (FZP) is used as a focusing element.
NTT-AT 's FZP uses a Ta pattern with high verticality as an absorbing material and a SiC membrane with high X-ray irradiation resistance as a holding material, and is widely used in synchrotron radiation facilities.
Production example
High aspect FZP: diameter 100 µm, Ta film thickness 2 µm, outermost zone width 200 nm, SiN membrane thickness 2.0 µm
Typical specifications
We will design according to your requested energy, focal length, resolution, etc.
| Typical specifications | |
|---|---|
| Minimum outermost zone width and aspect ratio | 50 nm (aspect ratio 4), 200 nm (aspect ratio 10) |
| maximum diameter | 2 mm |
| membrane material | SiC or SiN, 0.2 µm - 2 µm |
| absorber material | Ta, 0.1 µm - 2.0 µm |
| Si frame external dimensions | 10 mm x 10 mm x 1 mm thickness |
Optional parts
Absorber: Au, 30 µm thick, membrane: SiC
Material: Pt, 100 µm thick, pinhole diameter: 50 um
Contact us
Please feel free to contact us for inquiries such as an estimate.