X-ray chart
We provide resolution test charts for X-ray microscopes.
feature
X-ray microscopy is applied as a high-resolution imaging method in various fields, but charts with sufficiently high resolution are required for evaluation. NTT-AT 's X-ray chart, which has a high-definition tantalum (Ta) absorber pattern formed on SiC and SiN membranes, is used for resolution evaluation at synchrotron radiation facilities around the world.
Depending on your application, you can choose from three types: standard type, thick film high resolution type, and ultra high resolution type. We also offer reflective charts for the EUV region.
Standard product specifications
| item | Standard type XRESO-100 |
Thick film high resolution type XRESO-50HC |
Super high resolution type XRESO-20 |
|
|---|---|---|---|---|
| pattern | Absorber | Ta, 1.0 µm thickness | Ta, 500 nm thickness | Ta, 100 nm thick |
| minimum dimension | 100nm | 50 nm | 20 nm (radial pattern) | |
| pattern area | 250 µm×350 µm |
300 µm×300 µm
|
||
| membrane | Ru (20 nm)/SiN (2 µm) | Ru (20 nm)/SiC (200 nm)/SiN (50 nm) | ||
| substrate | Material/outer shape | Si, 10 mm×10 mm | ||
| Thickness | 1 mm | 0.625 mm | ||
*The specifications listed are subject to change without notice for product improvement. please note that.
Representative pattern SEM image
(XRSO-20)
(XRESO-20)
(XRSO-20)
(XRESO-50HC)
pattern layout
① Radial pattern, ② 100 nm hole pattern, ③ 50 nm line and space pattern
① Radial pattern, ② 50 nm line and space pattern
Image example
(Courtesy of Token Co., Ltd.)
Custom chart manufacturing example
Multilayer film: Mo/Si for wavelength 13.5 nm, absorber: Ta
Download materials
Contact us
Please feel free to contact us for inquiries such as an estimate.