EUV toroidal mirror
We provide high-precision toroidal mirrors for EUV, VUV, and soft X-ray regions.
feature
Grazing-incidence toroidal mirrors are used in experimental systems that require broadband high-order harmonic focusing, such as attosecond science. NTT-AT's toroidal mirrors are used by researchers at many universities and research institutes due to their shapes and various coatings that can be tailored to suit their needs.
Direct-incidence toroidal mirrors can be used in experimental systems where aberrations with spherical mirrors are an issue. Depending on your usage conditions, you can choose between high reflectance, broadband, or narrowband EUV multilayer coatings.
Production example
Oblique incidence angle 3 degrees
Oblique incidence angle 2 degrees
Coating examples
Typical specifications
We will design the substrate shape and coating according to your request.
| Typical specifications | |
|---|---|
| Maximum mirror length | 200 mm |
| minimum radius of curvature | 10 mm |
| Board shape accuracy | λ/4 PV @633 nm |
| Multilayer coating material | Mo/Si, Zr/AlSi, SiC/Mg |
| Single layer coating material | Au, Pt, Ru, Ni, B4C, SiC, C |
Contact us
Please feel free to contact us for inquiries such as an estimate.