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Soft X-ray multilayer polarizer

We provide reflective polarizers for the EUV region and soft X-ray region.

feature

polarizer images
W/B4C multilayer film polarizer

In the EUV region and soft X-ray region, where the refractive index of the material is close to 1, the Brewster's angle is around 45 degrees. Therefore, the multilayer mirror for use around 45 degrees has a high reflectance only for s-polarized light and also functions as a polarizer. Utilizing this characteristic, we offer multilayer film polarizers with sufficient efficiency from approximately 30 eV to 800 eV (1.5 nm - 40 nm).
These multilayer film polarizers are used not only for physical property experiments using synchrotron radiation and high-order harmonics, but also for basic research for industrial applications such as EUV lithography.

design example

Solid line: s-polarized light, dashed line: p-polarized light

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Polarizer for 60 eV energy
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Polarizer for 90 eV energy
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Polarizer for 150 eV dependent energy
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Polarizer for 300 eV energy

Typical specifications

We will design the substrate shape and coating according to your request.

Typical specifications
base size 10mm x 10mm x 1mm thickness
Substrate material Si
multilayer material SiC/Mg, Zr/AlSi, Mo/Si, Ru/B4C, W/B4C
Compatible energy range 30 eV - 800 eV

Contact us

Please feel free to contact us for inquiries such as an estimate.