Soft X-ray multilayer polarizer
We provide reflective polarizers for the EUV region and soft X-ray region.
feature

In the EUV region and soft X-ray region, where the refractive index of the material is close to 1, the Brewster's angle is around 45 degrees. Therefore, the multilayer mirror for use around 45 degrees has a high reflectance only for s-polarized light and also functions as a polarizer. Utilizing this characteristic, we offer multilayer film polarizers with sufficient efficiency from approximately 30 eV to 800 eV (1.5 nm - 40 nm).
These multilayer film polarizers are used not only for physical property experiments using synchrotron radiation and high-order harmonics, but also for basic research for industrial applications such as EUV lithography.
design example
Solid line: s-polarized light, dashed line: p-polarized light




Typical specifications
We will design the substrate shape and coating according to your request.
| Typical specifications | |
|---|---|
| base size | 10mm x 10mm x 1mm thickness |
| Substrate material | Si |
| multilayer material | SiC/Mg, Zr/AlSi, Mo/Si, Ru/B4C, W/B4C |
| Compatible energy range | 30 eV - 800 eV |
Contact us
Please feel free to contact us for inquiries such as an estimate.