Silicon waveguide (silicon photonics)
Foundry services that support cutting-edge research and development
Promote your research and development and realize your ideas! !
Features of our silicon waveguide manufacturing service
Fabrication of silicon waveguides based on customer designs
We realize ultra-fine optical circuits based on customer designs on a platform based on Si wire waveguides, supported by advanced processing technology.
*Please prepare a design drawing (GDSⅡ format or dxf format).
Achieves low-loss connections between silicon waveguides and optical fiber arrays
The inclusion of a spot size converter enables low-loss connection with optical fibers, enabling customers to perform highly accurate evaluations.
Capable of meeting various design needs
We offer options to meet a variety of customer needs, including precise control of optical properties and combining with different materials such as polymers.
Seamless support from silicon waveguide fabrication → characteristic evaluation → optical fiber mounting
We can seamlessly handle not only the fabrication of silicon waveguides, but also evaluation of optical properties and mounting of optical fibers to chips based on customer requests.
1. Si Thin Wire Waveguide - Basic Prototype Chip Fabrication -
We realize ultrafine optical circuits based on customer designs on Si wire waveguide-based platforms.
Specification example
| Waveguide core diameter | 400-500nm width x 220nm thickness |
|---|---|
| ring resonator gap | 150 nm or more |
| waveguide region | 5mm x 5mm |
| SS conversion core diameter | 3μm×3μm |
| SS converter waveguide spacing | 50 μm or more |
| Chip cutting size | 15mm x 5.6mm |
Compatible with passive waveguides and optical circuits
2. low-loss connections: spot size converters
By adding spot size conversion to the end of the waveguide, it can be connected to an optical fiber or laser with low loss. (1.5[dB/connection])
An example of connecting an optical fiber array to a Si chip
Fiber array connection structure
3. Optional processing examples
- Heater for temperature control and additional wiring
- Controls the transmission wavelength by controlling the refractive index with high precision.
- Introduction of functional materials
- Introduction of functional materials such as polarized materials.
Ultra-small Ta heater for temperature control
- Application example
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Optical switches, precision wavelength filters
- Customer requirements
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○Precise control of optical properties by local heating
- solution
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- By using a thin film of Ta, a metal with a high melting point, we have achieved a heater that is hard to break.
- High-precision shaping allows for ultra-fine heaters
- Low-resistance Au wiring allows heating of specific areas only
Example of Ta heater pattern processing on quartz (overclad)
Application example
Introduction of functional materials
Overcladding can be formed using a variety of functional materials.
- Application example
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Sensors, modulators
- Customer requirements
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Hybridization of Si waveguide and functional materials
- solution
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- Realization of partially exposed Si waveguide structure
- A combination of dry etching and wet etching is used to prevent damage to the Si waveguide.
- Realization of a process that does not partially form overclad
