SiC membrane/SiN membrane
This is a SiC or SiN thin film membrane used as a standard sample holder for X-ray analysis and electron beam analysis (SEM, TEM).
It can be customized to suit your needs as shown below.
- Metal thin film formation for use as a thin film target or beam splitter.
- Slit/pinhole formation for use as a beam shaping element.
- Sub-50 nm thick membrane (SiN) for use as soft X-ray or electron beam transmission element
Standard product specifications
| SiC | SiN (Insulating) | |
|---|---|---|
| Material | Amorphous or polycrystalline | Amorphous SiN |
| thickness | 100 nm - 2 μm | 50 nm - 2 μm |
| window size | 0.1 mm to 10 mm square (depending on film thickness) | |
| Cutting chip size | 2.1 mm - 20 mm Square | |
| Frame Thickness | 0.2 mm - 0.625mm | |
| substrate | Diameter 4 inches Si substrate | |
| option | Metal coating, slit/pinhole formation | |
Purpose
- Sample holder for X-ray, electron beam, and EUV analysis
- Liquid cell window material for chemical and biological analysis
- vacuum window
- Support material for transmission type X-ray optical element
Production example
dicing mold
