nm-scales for nm-beam size measurement
- We have made it possible to measure the fine beam sizes of electron beams, ion beams, and X-rays.
- Beam width can be measured in nm units.
- For 1D and 2D measurementare available.
(b) Transmitted electron beam intensity
Example of measuring electron beam size
K.Kurihara,K.Iwadate,H.Namatsu,
M.Nagase,H.Takenaka and K.Murase,
"An Electron Beam Nanolithography System and its Application to Si Nanofabrication",
Jpn.J.Appl.Phys.,34（1995）6940