Length measuring scale
- Ideal for length and angle calibration of scanning probe microscopes, etc. essential for fine pattern evaluation
- Low price and short delivery time
* We can also handle custom orders for extremely fine patterns with a pitch of 100nm or less.
Features and Specifications
| Vertical type (AS100P-D) | Inclined type (AS200P-A) | |
|---|---|---|
| Usage | Length calibration, probe shape evaluation | angle calibration |
| Feature |
|
|
| angle of inclination | 90 degree | 54.74 degrees |
| Pattern type | 1:1 L&S (concave outside the pattern area) | 400 nm L&S 400 nm grid 200 nm L&S 100 nmL&S or more 4 types |
| Line (convex) width | 50～250 nm | 100～400 nm |
| pattern depth | 125 nm±20％ | 100-200 nm (off-the-shelf) |
| pattern area | 200 μm × 200 μm | 184μm×184μm×4 (seed) |
| substrate | Si 10mm x 10mm x 0.525mmt | Si 10mm x 10mm x 0.525mmt |
*We offer low prices and fast delivery. Please feel free to contact us.
Vertical type (AS100P-D)
Inclined type (AS200P-A)
AFM observation image(unit: horizontal direction: μm, vertical direction: nm)
Examples of custom-made products
TEM observation image
